46.5L: Late‐News Paper: Large Area Sputtered Al2O3 Films for High Mobility AM‐TFT Backplanes on PVD Array System PiVot 55kVi2. Issue 1 (1st July 2013)
- Record Type:
- Journal Article
- Title:
- 46.5L: Late‐News Paper: Large Area Sputtered Al2O3 Films for High Mobility AM‐TFT Backplanes on PVD Array System PiVot 55kVi2. Issue 1 (1st July 2013)
- Main Title:
- 46.5L: Late‐News Paper: Large Area Sputtered Al2O3 Films for High Mobility AM‐TFT Backplanes on PVD Array System PiVot 55kVi2
- Authors:
- Kloeppel, Andreas
Liu, Jian
Scheer, Evelyn - Abstract:
- Abstract: The production worthiness of sputtered Al2 O3 barrier films on Gen 8.5 substrates using rotary targets on PVD array system PiVot™ is demonstrated in order to provide increased stability to IGZO AM‐OLED backplanes. The achieved Al2 O3 layer properties and uniformity illustrate the advantages of using rotary technology.
- Is Part Of:
- Digest of technical papers. Volume 44:Issue 1(2013)
- Journal:
- Digest of technical papers
- Issue:
- Volume 44:Issue 1(2013)
- Issue Display:
- Volume 44, Issue 1 (2013)
- Year:
- 2013
- Volume:
- 44
- Issue:
- 1
- Issue Sort Value:
- 2013-0044-0001-0000
- Page Start:
- 647
- Page End:
- 650
- Publication Date:
- 2013-07-01
- Subjects:
- Information display systems -- Congresses
621.3815422 - Journal URLs:
- http://catalog.hathitrust.org/api/volumes/oclc/1799368.html ↗
http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)2168-0159 ↗
http://ojps.aip.org/dbt/dbt.jsp?KEY=SIDSYM ↗
http://sid.aip.org/digest ↗
http://onlinelibrary.wiley.com/ ↗ - DOI:
- 10.1002/j.2168-0159.2013.tb06294.x ↗
- Languages:
- English
- ISSNs:
- 0097-966X
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 8271.680000
British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 20623.xml