Characterization of deuteriated titanium thin film by residual gas analyzer. (February 2022)

• Record Type: Journal Article
• Authors: Das, Basanta Kumar; Das, Rashmita; Verma, Rishi; Sharma, Archana
• Is Part Of: Vacuum. Volume 196(2022)
• Publication Date: 2022-02
• Subjects: Titanium thin film -- Deuteriated target -- Gettering -- Thermal desorption -- Residual gas analyzer; Vacuum -- Periodicals; 621.55
• DOI: 10.1016/j.vacuum.2021.110724
• Languages: English
• ISSNs: 0042-207X

Abstract

Abstract: Titanium thin film was prepared on copper substrate by thermal evaporation method. Gettering property of titanium film for deuterium was studied for different values of temperature, pressure and time. The studies were carried out in an ultra high vacuum system. The substrate was mounted in the vacuum system on a heater whose temperature was controlled by PID controller. The titanium thin film was activated for 1 h at a temperature of 500 °C under vacuum. After activation, during cool down, the vacuum chamber was pressurized at various pressure values of deuterium and left for absorption for various time periods. Comparative studies of the amount of deuterium desorption for various charging pressure and exposure time were studied with the help of residual gas analyzer. Attempts were made to qualify the process of deuteration of the titanium film. The results of these studies are presented in this article. Highlights: Comparative study of deuteriated titanium thin film performed by RGA. RGA spectrum reveals about surface limited and diffusion limited desorption. Effect of charging pressure & duration on bulk concentration of deuterium studied. Achievement of higher bulk concentration could be established through this study.