Design of a pure rotation micropositioning stage with dual-range. (March 2022)

• Record Type: Journal Article
• Authors: Zhang, Juncang; Gan, Jinqiang; Ding, Huafeng; Li, Hai
• Is Part Of: Mechanism and machine theory. Volume 169(2022)
• Publication Date: 2022-03
• Subjects: Micropositioning stage -- Pure rotation -- Dual-range -- Piezoelectric actuator; Machine theory -- Periodicals; Machinery -- Periodicals; Machines -- Périodiques; Génie mécanique -- Périodiques; Machine theory; Machinery; Periodicals; 621.81
• DOI: 10.1016/j.mechmachtheory.2021.104631
• Languages: English
• ISSNs: 0094-114X

Abstract

Abstract: In this paper, a pure rotation micropositioning stage with dual-range is designed to acquire a large-rotation angle and a high-resolution at the same time. The designed stage consists of a large-range rotation mechanism and a small-range rotation mechanism and it combines nested structure, multi-layer and symmetric structure. Analytical modeling is presented to investigate the kinematic and static characteristics by using the compliance matrix method and pseudo-rigid-body model. A series of simulations are conducted to demonstrate the effectiveness of the proposed design. The simulation results show that the designed stage has a large-rotation range of [0 mrad, 17.40 mrad] and a small-rotation range of [0 mrad, 0.88 mrad]. Highlights: • A pure rotation micropositioning stage with dual-range is designed. • The stage consists of a large-range and a small-range rotation mechanism. • The stage combines nested structure, multi-layer and symmetric structure. • The stage has the merits of large output angle, high resolution and compact size.