High‐Resolution Scanning Probe Nanolithography of 2D Materials: Novel Nanostructures. Issue 7 (13th June 2019)

• Record Type: Journal Article
• Authors: Rani, Ekta; Wong, Lu Shin
• Is Part Of: Advanced materials technologies. Volume 4:Issue 7(2019)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2019-06-13
• Subjects: 2D materials -- additive lithography -- graphene -- scanning probe nanolithography -- subtractive lithography; Materials science -- Periodicals; Technological innovations -- Periodicals; Materials science; Technological innovations; Periodicals; 620.1105
• DOI: 10.1002/admt.201900181
• Languages: English
• ISSNs: 2365-709X

Abstract

Abstract: 2D materials have attracted tremendous research interest since the isolation of graphene. Their remarkable optical, electronic, and mechanical properties show that they hold great potential across a range of technological applications. As a result, there is a growing demand for low‐cost, low‐energy, and high‐resolution lithography methods that will enable the integration of 2D materials into complex integrated circuitry, biomedical devices, and in the generation of quantum‐confined nanostructures. Recent advances in scanning probe nanolithography (SPL) techniques for the lithography of 2D materials such as graphene, black phosphorus, molybdenum disulfide, and tungsten diselenide are discussed, including the various physiochemical aspects of subtractive and additive lithography of these materials. Examples of 2D‐material‐based devices fabricated by SPL and their properties are also described. The comparative advantages of the individual SPL techniques are discussed along with the future outlook of SPL for 2D materials. Abstract : Recent advances in the application of scanning probe lithography to 2D materials offer a route to the rapid and convenient fabrication of nanoscale devices. Both subtractive and additive lithography, as applied to graphene and other emerging 2D materials, are discussed. Their use in the fabrication of 2D‐materials‐based devices are described, and future avenues for the development of this technology are discussed.