Cite
HARVARD Citation
Park, S. et al. (2022). Enhanced thickness uniformity of large-scale α-Ga2O3 epilayers grown by vertical hot-wall mist chemical vapor deposition. Ceramics international. 48 (4), pp. 5075-5082. [Online].
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Park, S. et al. (2022). Enhanced thickness uniformity of large-scale α-Ga2O3 epilayers grown by vertical hot-wall mist chemical vapor deposition. Ceramics international. 48 (4), pp. 5075-5082. [Online].