Wireless passive separated LC temperature sensor based on high-temperature co-fired ceramic operating up to 1500 °C. (1st February 2019)

• Record Type: Journal Article
• Authors: Ji, Yaohui; Tan, Qiulin; Lu, Xiao; Zhang, Guangjin; Zhang, Wendong; Xiong, Jijun
• Is Part Of: Journal of micromechanics and microengineering. Volume 29:Number 3(2019:Mar.)
• Publication Date: 2019-02-01
• Subjects: wireless passive sensor -- high-temperature -- separation inductance and capacitance -- signal strength; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/1361-6439/aafde1
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: This paper presents a wireless passive resonant temperature sensor based on high-temperature co-fired ceramic (HTCC) and platinum conductive metal, which has a new structure that separates inductors and capacitors, allowing the sensor's maximum operating temperature to reach 1500 °C. In the temperature range of 43 °C–1500 °C, the resonant frequency of the sensor is extracted and the fitting curve between the frequency and temperature is obtained to demarcate the sensor. The average sensitivity of the sensor can be calculated as 6.7562 kHz °C −1 over the entire test temperature range. In addition, it was found that the maximum relative error of the sensor was only 0.24% via a repeatability experiment, and the hysteresis of the sensor mentioned in this paper is significantly reduced. Moreover, the signal intensity of the sensor mentioned in this paper and the traditional LC sensor are compared in experiments. The experimental results show that the proposed sensor has strong signal readability and meets the requirements of high-temperature testing.