23.3: Invited Paper: Upgrading Self‐Aligned Imprint Lithography (SAIL) in Preparation for Roll‐to‐Roll Manufacturing of Large‐Sized High‐Performance Flexible Electronics. Issue 1 (1st July 2013)

• Record Type: Journal Article
• Authors: Kim, Han‐Jun; Elder, Richard; Vornbrock, Alejandro de la Fuente; Hoffman, Randy; Holland, Edward; Jeans, Albert; Luo, Hao; Maltabes, John; Mei, Ping; Perlov, Craig; Taussig, Carl; Morrison, Neil
• Is Part Of: Digest of technical papers. Volume 44:Issue 1(2013)
• Page Start: 275
• Page End: 278
• Publication Date: 2013-07-01
• Subjects: Flexible display -- metal oxide TFT -- imprint lithography -- roll‐to‐roll -- SAIL; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/j.2168-0159.2013.tb06199.x
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract: Self‐aligned imprint lithography (SAIL) is currently being upgraded to a next stage to better address the needs for roll‐to‐roll compatible manufacturing of large‐sized flexible OLED display backplanes. Cu and oxide semiconductors are preferred choices of materials, and control of process and yield becomes even more important an issue.