Coaxial displacement sensor using a lateral shear interferometer with a phase grating. (December 2021)

• Record Type: Journal Article
• Authors: Furuya, M.; Fujii, E.; Fujiwara, H.
• Is Part Of: Measurement. Volume 18(2021)
• Publication Date: 2021-12
• Subjects: Phase grating -- Lateral shear interferometer -- Displacement sensor; Detectors -- Periodicals; Measurement -- Periodicals; 530.7
• DOI: 10.1016/j.measen.2021.100084
• Languages: English
• ISSNs: 2665-9174

Abstract

Abstract: As a new non-contact method of measuring object displacement, a coaxial displacement sensor using a lateral shear interferometer with a phase grating is proposed. This proposed method uses a phase grating to generate fringes for the evaluation of displacement by means of spatial frequency analysis. Compared with triangulation-based displacement sensors which are widely used for industrial applications, this sensor makes stable measurement because there is no occlusion, and it has a simpler optical system than other non-contact optical methods. The steel pin gauge was measured by the triangulation-based displacement sensor and by the proposed method respectively, and the results confirmed that stable measurement was performed in any scanning orientation of the pin gauge in the proposed method.