Detection of shock wave in laser ablation using a photonic nanojet. (December 2021)

• Record Type: Journal Article
• Authors: Uenohara, Tsutomu; Yasuda, Makoto; Mizutani, Yasuhiro; Takaya, Yasuhiro
• Is Part Of: Measurement. Volume 18(2021)
• Publication Date: 2021-12
• Subjects: Photonic nanojet -- Shock wave -- Laser ablation; Detectors -- Periodicals; Measurement -- Periodicals; 530.7
• DOI: 10.1016/j.measen.2021.100217
• Languages: English
• ISSNs: 2665-9174

Abstract

Abstract: A photonic nanojet (PNJ) is a high intensity light beam that has beam diameter of sub-micrometers and depth of focus of several micrometers. In order to improve the accuracy and resolution of laser ablation using a PNJ, a shock wave generated in laser ablation was focused on. The shock wave pressure depends on the distance from sample surface and the shape of the surface. Thus, detection of the shock wave makes it possible to estimate the processing state. The confocal system made it possible to detect the shock wave via the vibration of the microsphere. The vibration signals in the time domain were Fourier transformed in the frequency domain. After the laser irradiation, there was a frequency peak that was not seen before the laser irradiation. Therefore, it was demonstrated that the shock wave generated by laser ablation could be detected from the vibration of the microsphere.