In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities (Laser Photonics Rev. 15(11)/2021). Issue 11 (10th November 2021)

• Record Type: Journal Article
• Authors: Chambonneau, Maxime; Grojo, David; Tokel, Onur; Ilday, Fatih Ömer; Tzortzakis, Stelios; Nolte, Stefan
• Is Part Of: Laser & photonics reviews. Volume 15:Issue 11(2022)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2021-11-10
• Subjects: Lasers -- Periodicals; Photonics -- Periodicals; Lasers -- Périodiques; Photonique -- Périodiques; 621.36
• DOI: 10.1002/lpor.202170059
• Languages: English
• ISSNs: 1863-8880

Abstract

Abstract : Laser Direct Writing The development of in‐volume laser direct writing of silicon as it exists for transparent materials for a quarter of a century remains a major challenge to tackle. In article number 2100140, Maxime Chambonneau and co‐workers give a comprehensive review on the physical limitations to the excitation of bulk silicon with ultrashort laser pulses, the devised solutions, and the demonstrated applications.