Opportunities and Challenges in APT Metrology for Semiconductor Applications. (August 2019)
- Record Type:
- Journal Article
- Title:
- Opportunities and Challenges in APT Metrology for Semiconductor Applications. (August 2019)
- Main Title:
- Opportunities and Challenges in APT Metrology for Semiconductor Applications
- Authors:
- Fleischmann, Claudia
Cuduvally, Ramya
Morris, Richard
Melkonyan, Davit
de Beeck, Jonathan Op
Makhotkin, Igor
van der Heide, Paul
Vandervorst, Wilfried - Abstract:
- Is Part Of:
- Microscopy and microanalysis. Volume 25:(2022)Supplement 2
- Journal:
- Microscopy and microanalysis
- Issue:
- Volume 25:(2022)Supplement 2
- Issue Display:
- Volume 25, Issue 2 (2019)
- Year:
- 2019
- Volume:
- 25
- Issue:
- 2
- Issue Sort Value:
- 2019-0025-0002-0000
- Page Start:
- 312
- Page End:
- 313
- Publication Date:
- 2019-08
- Subjects:
- Microscopy -- Periodicals
Microchemistry -- Periodicals
502.82 - Journal URLs:
- https://academic.oup.com/mam ↗
http://journals.cambridge.org/action/displayJournal?jid=MAM ↗
http://link.springer.de/link/service/journals/10005/index.htm ↗
http://firstsearch.oclc.org ↗ - DOI:
- 10.1017/S1431927619002290 ↗
- Languages:
- English
- ISSNs:
- 1431-9276
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library HMNTS - ELD Digital store
- Ingest File:
- 20026.xml