Cite
HARVARD Citation
Morozov, N. et al. (2022). Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements. International journal of non-linear mechanics. p. . [Online].
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Morozov, N. et al. (2022). Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements. International journal of non-linear mechanics. p. . [Online].