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HARVARD Citation
Kalderon, B. et al. (2021). Layered Si–Ti oxide thin films with tailored electrical and optical properties by catalytic tandem MLD-ALD. RSC advances. 11 (56), pp. 35099-35109. [Online].
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Kalderon, B. et al. (2021). Layered Si–Ti oxide thin films with tailored electrical and optical properties by catalytic tandem MLD-ALD. RSC advances. 11 (56), pp. 35099-35109. [Online].