Angular distribution measurement of high-energy argon neutral and ion in a 13.56 MHz capacitively-coupled plasma. (10th November 2021)

• Record Type: Journal Article
• Authors: Ichikawa, Keita; Chu, Manh Hung; Moriyama, Makoto; Nakahara, Naoya; Suzuki, Haruka; Iino, Daiki; Fukumizu, Hiroyuki; Kurihara, Kazuaki; Toyoda, Hirotaka
• Is Part Of: Applied physics express. Volume 14:Number 12(2021)
• Publication Date: 2021-11-10
• Subjects: ion and neutral angular distribution -- capacitively-coupled plasma -- high energy ion -- high energy neutral; Physics -- Periodicals; Technology -- Periodicals; 621.05
• DOI: 10.35848/1882-0786/ac33c4
• Languages: English
• ISSNs: 1882-0778

Abstract

Abstract: Angular distributions of high energy neutrals and ions, impinging on an RF-biased electrode in a 13.56 MHz capacitively-coupled argon plasma were investigated. Ions and neutrals were introduced into a drift chamber that was directly connected to the RF electrode. A two-dimensional beam image was measured by a micro-channel plate. Neutral and ion beams were separated by an electrostatic deflector in the drift chamber. Angular distribution widths for ion and neutral were less than 1° at self-bias voltages above 300 V and monotonically decreased with increasing the self-bias voltage. Neutral angular distribution width was larger than that of ion, irrespective of self-bias voltage.