Cite
HARVARD Citation
Yue, Y. et al. (2021). Quality improvement mechanism of sputtered AlN films on sapphire substrates with high-miscut-angles along different directions. CrystEngComm. 23 (39), pp. 6871-6878. [Online].
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Yue, Y. et al. (2021). Quality improvement mechanism of sputtered AlN films on sapphire substrates with high-miscut-angles along different directions. CrystEngComm. 23 (39), pp. 6871-6878. [Online].