Cite
HARVARD Citation
Zhou, J. et al. (2021). Multi-field simulation and optimization of SiNx:H thin-film deposition by large-size tubular LF-PECVD. Solar energy. pp. 575-585. [Online].
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Zhou, J. et al. (2021). Multi-field simulation and optimization of SiNx:H thin-film deposition by large-size tubular LF-PECVD. Solar energy. pp. 575-585. [Online].