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Erratum: "Effect of carbon in Si oxide interlayers of the Al2O3/4H-SiC structure on interfacial reaction by oxygen radical treatment" [Jpn. J. Appl. Phys. 58 SBBD05 (2019)]. (27th March 2019)
Record Type:
Journal Article
Title:
Erratum: "Effect of carbon in Si oxide interlayers of the Al2O3/4H-SiC structure on interfacial reaction by oxygen radical treatment" [Jpn. J. Appl. Phys. 58 SBBD05 (2019)]. (27th March 2019)
Main Title:
Erratum: "Effect of carbon in Si oxide interlayers of the Al2O3/4H-SiC structure on interfacial reaction by oxygen radical treatment" [Jpn. J. Appl. Phys. 58 SBBD05 (2019)]