Real-time observation on hot-filament-assisted CVD growth of graphene. (10th July 2019)

• Record Type: Journal Article
• Authors: Taira, Takanobu; Shinohara, Takuya; Obata, Seiji; Saiki, Koichiro
• Is Part Of: Japanese journal of applied physics. Volume 58:Number SI(2019)
• Publication Date: 2019-07-10
• Subjects: Physics -- Periodicals; 621.05
• DOI: 10.7567/1347-4065/ab106f
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: The effect of hot-filament on CVD growth of graphene was investigated using radiation-mode optical microscopy (Rad-OM), which we developed for the real-time observation of the CVD process of graphene. We found that the hot-filament induced nucleation and accelerated growth of graphene, the effects of which were enhanced by raising the filament temperature. At a certain filament temperature, growth was accelerated while no additive nucleation occurred. The present results suggest that decomposing source gas by hot-filament at optimized filament temperatures can accelerate growth while suppressing additive nucleation, which would be useful for synthesizing large-area single-crystalline graphene in a short time.