Cite
HARVARD Citation
Kim, J. et al. (2021). Effect of H2 addition during PECVD on the moisture barrier property and environmental stability of H:SiNx film. Journal of the American Ceramic Society. 104 (12), pp. 6670-6677. [Online].
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Kim, J. et al. (2021). Effect of H2 addition during PECVD on the moisture barrier property and environmental stability of H:SiNx film. Journal of the American Ceramic Society. 104 (12), pp. 6670-6677. [Online].