Echelle gratings tiling method based on lateral shearing interferometry. (January 2022)

• Record Type: Journal Article
• Authors: Li, Yifan; Mi, Xiaotao; Qi, Xiangdong; Zhang, Shanwen; Yang, Guojun; Yu, Hongzhu; Li, Xiaotian; Li, Wenhao
• Is Part Of: Optics & laser technology. Volume 145(2022)
• Publication Date: 2022-01
• Subjects: Echelle grating -- Tiled gratings -- Shearing interferometry; Optics -- Periodicals; Lasers -- Periodicals; Electronic journals; 621.366
• DOI: 10.1016/j.optlastec.2021.107475
• Languages: English
• ISSNs: 0030-3992

Abstract

Highlights: The special condition in grating tiling caused by characteristics of echelles is discussed. Lateral shearing interferometry technique for dual-beam is modified for grating tiling. Theoretical analysis and simulations of the LSI method is proposed. High alignment accuracy is achieved in verification experiment using a simple setup. Abstract: A method for echelle gratings tiling based on lateral shearing interferometry is proposed. Fringe patterns of the grating assembly are generated by a wedge plate. Mosaic errors can be calculated and corrected by observing the working order and its adjacent order. An experimental mosaic of two 50 mm × 50 mm, 79 grooves / mm echelles is aligned to verify the theory. The rms wavefront is better than 0.04 wavelength. Angular and translation sensitivities of less than 1 arcsec and 10 nm are achieved respectively.