Thin Films for the Future: Excimer lasers drive industrial‐scale PLD manufacturing of innovative thin films. Issue 6 (6th November 2020)
- Record Type:
- Journal Article
- Title:
- Thin Films for the Future: Excimer lasers drive industrial‐scale PLD manufacturing of innovative thin films. Issue 6 (6th November 2020)
- Main Title:
- Thin Films for the Future
- Authors:
- Delmdahl, Ralph
- Abstract:
- Abstract: From having the hardness of diamond to carrying currents several hundred times that of copper, thin films make a difference in today's high‐tech systems and solutions. Pulsed laser deposition as a layer by layer growth technology excels in growing the most complex oxides and even produces epitaxial films with high crystal orientation. Powered by UV excimer lasers, it has long reached 24/7 production maturity and is successfully applied to industrial thin film manufacturing on large substrate wafers, panels and tapes.
- Is Part Of:
- PhotonicsViews. Volume 17:Issue 6(2020)
- Journal:
- PhotonicsViews
- Issue:
- Volume 17:Issue 6(2020)
- Issue Display:
- Volume 17, Issue 6 (2020)
- Year:
- 2020
- Volume:
- 17
- Issue:
- 6
- Issue Sort Value:
- 2020-0017-0006-0000
- Page Start:
- 60
- Page End:
- 62
- Publication Date:
- 2020-11-06
- Subjects:
- Photonics -- Periodicals
Optics -- Periodicals
Lasers -- Periodicals
621.36
621.36 - Journal URLs:
- https://onlinelibrary.wiley.com/loi/26261308 ↗
http://onlinelibrary.wiley.com/ ↗ - DOI:
- 10.1002/phvs.202000048 ↗
- Languages:
- English
- ISSNs:
- 2626-1294
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store - Ingest File:
- 19355.xml