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HARVARD Citation
Kim, J. et al. (2018). Advanced PIC-MCC simulation for the investigation of step-ionization effect in intermediate-pressure capacitively coupled plasmas. Journal of physics. p. . [Online].
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Kim, J. et al. (2018). Advanced PIC-MCC simulation for the investigation of step-ionization effect in intermediate-pressure capacitively coupled plasmas. Journal of physics. p. . [Online].