An analytical depth resolution function for the MRI model. (18th October 2013)

• Record Type: Journal Article
• Authors: Liu, Y.; Hofmann, S.; Wang, J. Y.
• Is Part Of: Surface and interface analysis. Volume 45:Number 11/12(2013:Nov.)
• Page Start: 1659
• Page End: 1660
• Publication Date: 2013-10-18
• Subjects: depth profile -- depth resolution function -- response function; Surfaces (Physics) -- Periodicals; Surface chemistry -- Periodicals; Thin films -- Periodicals; 541.33
• DOI: 10.1002/sia.5319
• Languages: English
• ISSNs: 0142-2421

Abstract

Abstract : The mixing roughness information depth model is frequently used for the quantification of sputter depth profiles. In general, the solution of the convolution integral for any kind of in‐depth distributions is achieved by numerical methods. For a thin delta layer, an analytical depth resolution function is presented, which enables a simple and user‐friendly quantification of measured delta layer profiles in AES, XPS and SIMS. Copyright © 2013 John Wiley & Sons, Ltd.