Cite
HARVARD Citation
Orellana, S. et al. (2015). Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL interconnect. Microelectronics and reliability. 55 (9), pp. 1896-1900. [Online].
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Orellana, S. et al. (2015). Robust design of thermo-mechanical MEMS switch embedded in aluminium BEOL interconnect. Microelectronics and reliability. 55 (9), pp. 1896-1900. [Online].