A self-calibration method with high-accuracy and low-cost for large-area motion stage based on digital grating projection mode. (30th October 2019)

• Record Type: Journal Article
• Authors: Huang, Shengzhou; Li, Mujun; Wang, Lei; Su, Yongsheng; Liang, Yi
• Is Part Of: Applied physics express. Volume 12:Number 12(2019)
• Publication Date: 2019-10-30
• Subjects: self-calibration -- digital micromirror device (DMD) -- digital grating projection mode -- positional accuracy -- reverse strategy -- least square method; Physics -- Periodicals; Technology -- Periodicals; 621.05
• DOI: 10.7567/1882-0786/ab4f58
• Languages: English
• ISSNs: 1882-0778

Abstract

Abstract: We report a self-calibration method with high-accuracy and low-cost for large-area motion stage. A programmable digital grating projection mode based on digital micromirror device was proposed, which can effectively avoid defocusing problem of calibration system and complete a stable high-accuracy calibration. Instead of adopting the high-cost laser interferometer measurement system, a self-calibration method based on reverse strategy was developed, which can easily obtain an optimal positional accuracy. This presented method can be expected to provide a new route for developing various applications such as laser direct writing equipment, automated optical inspection equipment.