Evaluation of pH Measurement Using Electron‐Beam‐Induced Current Detection. Issue 18 (29th July 2021)

• Record Type: Journal Article
• Authors: Shibano, Satoru; Kawata, Yoshimasa; Inami, Wataru
• Is Part Of: Physica status solidi. Volume 218:Issue 18(2021)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2021-07-29
• Subjects: chemical sensors -- light‐addressable potentiometric sensors -- electron‐beam induced current -- spatial resolution; Solid state physics -- Periodicals; Solids -- Industrial applications -- Periodicals; 530.41
• DOI: 10.1002/pssa.202100147
• Languages: English
• ISSNs: 1862-6300

Abstract

Abstract : The study of biological functions requires measurements of changes in intracellular ion concentrations and their distribution. Ion‐sensitive field‐effect transistors and light‐addressable potentiometric sensors (LAPSs) operate on the basis of ion‐sensitive membranes and semiconductors that can measure the ion concentration around cells. In this study, the authors develop an ion sensors based on an operating principle similar to that of LAPSs. An electron beam rather than light is utilized. When a semiconductor is irradiated with an electron beam, electron–hole pairs are generated, and an induced current is produced with an amplitude that depends on the ion concentration. The bias voltage characteristics of the capacitance and photocurrent of the fabricated sensor substrate are evaluated and it is demonstrated that the proton concentration could be measured with an electron beam based on the same principle as in LAPSs. Abstract : A method for measuring the pH of a solution using an electron‐beam‐induced current (EBIC) detection is proposed. The use of an electron beam and a thin sensor substrate is expected to provide a high spatial resolution. It is demonstrated that pH‐dependent changes in the capacitance can be measured using the EBIC.