Measurements of the absolute intensities of spectral lines of Kr, Ar, and O ions in the wavelength range of 10 – 18 nm under pulsed laser excitation. (August 2021)

• Record Type: Journal Article
• Authors: Vodop'yanov, A.V.; Garakhin, S.A.; Zabrodin, I.G.; Zuev, S.Yu.; Lopatin, A.Ya.; Nechay, A.N.; Pestov, A.E.; Perekalov, A.A.; Pleshkov, R.S.; Polkovnikov, V.N.; Salashchenko, N.N.; Smertin, R.M.; Ulasevich, B.A.; Chkhalo, N.I.
• Is Part Of: Quantum electronics. Volume 51:Number 8(2021)
• Page Start: 700
• Page End: 707
• Publication Date: 2021-08
• Subjects: extreme UV radiation -- emission spectra -- laser-produced -- spark -- spectrometer -- plasma -- X-ray multilayer mirror; Quantum electronics -- Periodicals; 537.5
• DOI: 10.1070/QEL17598
• Languages: English
• ISSNs: 1063-7818

Abstract

Abstract: We have measured the absolute intensities of the spectral lines of Kr, Ar, and O ions (CO2 gas), which are of interest for reflectometry, microscopy, and lithography in the wavelength range of 10 – 18 nm. We have used pulsed excitation by an Nd : YAG laser with an output wavelength λ = 1064 nm, a pulse energy of 0.8 J, a pulse duration of 5.2 ns and a pulse repetition rate of 10 Hz. The targets are formed during gas outflow through a pulsed supersonic conical nozzle for an inlet gas pressure of 3.5 bar. A spectrometer based on X-ray multilayer mirrors and its calibration procedure are described in detail. The absolute intensities of the spectral lines of Kr IX ( λ = 11.5 nm; number of photons: N = 9.3 × 10 12 photons pulse −1 ), Ar VIII ( λ = 13.84 nm, N = 3 × 10 12 photons pulse −1 ), and O VI ( λ = 12.98 nm, N = 5.17 × 10 12 photons pulse −1 ). The results are compared with the data obtained for Xe ions under the same experimental conditions at the same wavelengths.