Combine TEM with TCAD Simulation - A Novel Approach in Failure Analysis. (August 2021)
- Record Type:
- Journal Article
- Title:
- Combine TEM with TCAD Simulation - A Novel Approach in Failure Analysis. (August 2021)
- Main Title:
- Combine TEM with TCAD Simulation - A Novel Approach in Failure Analysis
- Authors:
- Zhang, Yu
Kodali, Satish
Banghart, Edmund
Mitchell, Travis
Baumann, Frieder - Abstract:
- Is Part Of:
- Microscopy and microanalysis. Volume 27:Supplement 1(2021)
- Journal:
- Microscopy and microanalysis
- Issue:
- Volume 27:Supplement 1(2021)
- Issue Display:
- Volume 27, Issue 1 (2021)
- Year:
- 2021
- Volume:
- 27
- Issue:
- 1
- Issue Sort Value:
- 2021-0027-0001-0000
- Page Start:
- 1548
- Page End:
- 1549
- Publication Date:
- 2021-08
- Subjects:
- Microscopy -- Periodicals
Microchemistry -- Periodicals
502.82 - Journal URLs:
- https://academic.oup.com/mam ↗
http://journals.cambridge.org/action/displayJournal?jid=MAM ↗
http://link.springer.de/link/service/journals/10005/index.htm ↗
http://firstsearch.oclc.org ↗ - DOI:
- 10.1017/S1431927621005717 ↗
- Languages:
- English
- ISSNs:
- 1431-9276
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library HMNTS - ELD Digital store
- Ingest File:
- 18827.xml