Effect of Al2O3 on structural dynamics and dielectric properties of lithium metasilicate photoetchable glasses as an interposer technology for microwave integrated circuits. Issue 11 (1st August 2020)

• Record Type: Journal Article
• Authors: Liang, Tianpeng; Zhang, Jihua; Chen, Hongwei; Gao, Libin; Gan, Gongwen; Qu, Sheng; Wu, Chongsheng; Harris, Vincent G.
• Is Part Of: Ceramics international. Volume 46:Issue 11(2020)Part A
• Page Start: 18032
• Page End: 18036
• Publication Date: 2020-08-01
• Subjects: Dielectric properties -- Photoetchable glass -- Al2O3 -- Mid-infrared spectroscopy; Ceramics -- Periodicals; Céramique industrielle -- Périodiques; Ceramics; Periodicals; Electronic journals; 666
• DOI: 10.1016/j.ceramint.2020.04.119
• Languages: English
• ISSNs: 0272-8842

Abstract

Abstract: Photoetchable glasses (PEG) are widely used as interposers in radio frequency electronic systems. However, high dielectric losses limit the utilization of PEGs in three-dimensional integrated microsystems. Herein, the internal structure of PEGs is shown to be altered by the addition of Al2 O3 and its influence on dielectric properties systematically studied by X-ray diffraction, Raman spectroscopy and FT-infrared spectroscopy (FTIR). The Al2 O3 content significantly influences the ring structure and an amount equal to 4 wt% results in a high degree of crystallinity and phase purity of lithium metasilicate. Lastly, a dielectric constant of 5.1 and dielectric loss of 3 × 10 -3 were obtained at 1 GHz, which is attributed to weakened structural vibrations, without loss to attractive etching properties.