48.2: Dark Alloyed Metal‐Oxides for Sputter Deposition: Material comparison and processability. (26th August 2021)

• Record Type: Journal Article
• Authors: Schmidt, Hennrik; Koestenbauer, Harald; Franzke, Enrico; Lorenz, Dominik; Linke, Christian; Winkler, Joerg
• Is Part Of: Digest of technical papers. Volume 52(2021)Supplement 2
• Page Start: 582
• Page End: 585
• Publication Date: 2021-08-26
• Subjects: Molybdenum alloys -- Metal-oxides -- dark layer -- TFTs; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/sdtp.15210
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract : Metal‐oxides (MeOx), for example electrical conducting sub‐stoichiometric Molybdenum‐Oxide (MoOx) can be used to create dark layers to cover otherwise reflective lines. While the optical properties are well developed and understood, this work focuses on the investigation of chemical stability, relevant for process integration. For this we analyze and compare different alloys and summarize the thin film properties for different applications.