Silicon monolithic microflow sensors: a review. (1st September 2021)

• Record Type: Journal Article
• Authors: Wang, Jiachou; Xue, Dan; Li, Xinxin
• Is Part Of: Journal of micromechanics and microengineering. Volume 31:Number 10(2021)
• Publication Date: 2021-09-01
• Subjects: microelectromechanical systems -- non-thermal flow sensors -- thermal flow sensors -- microfabrication; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/1361-6439/ac1f3a
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: Flow measurement is an essential requirement in medical, industrial, automotive and environmental applications, Thanks to the rapid development of microelectromechanical system (MEMS) micro-fabrication techniques, silicon-based microflow sensor chips used as the key component of microfluidic control systems have attracted particular attentions due to the miniaturized chip-size, high precision, low power consumption, rapid response and low-cost batch-fabrication capability. Up to present, many different types of silicon microflow sensors have been proposed and developed. This paper provides a review on recently completed works on design, fabrication and properties of the MEMS-based silicon monolithic microflow sensors. Some technical challenges and application outlooks are also discussed in the paper.