Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures. Issue 5 (3rd May 2020)

• Record Type: Journal Article
• Authors: Zhang, Zilong; Wu, Yuanzhao; Sang, Liwen; Wu, Haihua; Huang, Jian; Wang, Linjun; Takahashi, Yukiko; Li, Runwei; Koizumi, Satoshi; Toda, Masaya; Akita, Indianto Mohammad; Koide, Yasuo; Liao, Meiyong
• Is Part Of: Materials research letters. Volume 8:Issue 5(2020)
• Page Start: 180
• Page End: 186
• Publication Date: 2020-05-03
• Subjects: Single-crystal diamond -- galfenol (FeGa) -- magnetostrictive effect -- MEMS; Materials science -- Research -- Periodicals; Biomedical materials -- Research -- Periodicals; Composite materials -- Research -- Periodicals; Biomedical materials -- Research; Composite materials -- Research; Materials science -- Research; Periodicals; 620.1105
• DOI: 10.1080/21663831.2020.1734680
• Languages: English
• ISSNs: 2166-3831

Abstract

ABSTRACT: Micro-electromechanical systems (MEMS) magnetic sensing at high temperatures over 573 K has not been achieved due to the difficulty in designing the rational interface with strong coupling. Here, a magnetic sensor based on FeGa/single-crystal diamond (SCD) MEMS resonator is realized to circumvent the challenges in magnetic sensing. The present magnetic sensor exhibits a stable high-sensitivity of 7.3 Hz/mT at 573 K and an experimental noise level of ~4nT/√Hz. The performance exceeds those of reported high-temperature magnetic sensors. This work offers a strategy for developing magnetic sensors with merits super to the existing ones. GRAPHICAL ABSTRACT: Abstract : IMPACT STATEMENT The first high-temperature MEMS magnetic sensor over 573 K super to the present ones is realized by coupling a magneto-strictive FeGa film with a diamond MEMS resonator.