Coplanar waveguides on BCB measured up to 760 GHz. Issue 15 (13th October 2021)

• Record Type: Journal Article
• Authors: Zerounian, N.; Aouimeur, W.; Grimault-Jacquin, A.-S.; Ducournau, G.; Gaquière, C.; Aniel, F.
• Is Part Of: Journal of electromagnetic waves and applications. Volume 35:Issue 15(2021)
• Page Start: 2051
• Page End: 2061
• Publication Date: 2021-10-13
• Subjects: Transmission lines -- THz coplanar waveguides -- submillimeter wave waveguides -- polymer dielectric -- submillimeter scattering parameters -- electromagnetic modeling; 77.55.Bh -- 81.05.Lg -- 84.37.+q -- 84.40.Az; Electromagnetic waves -- Periodicals; Electromagnetic devices -- Periodicals; 621.3
• DOI: 10.1080/09205071.2021.1930588
• Languages: English
• ISSNs: 0920-5071

Abstract

Abstract : The integrated THz pattern over any MMIC appears to be a good opportunity to enclose calibration kit suitable for accurate measurements. An original technology based on polymer has been developed. Sub-millimeter single-mode conductor-backed coplanar waveguides using benzocyclobutene polymer and interconnecting via between ground planes are processed and measured up to 760 GHz. The experimental performances show good agreement with analytical and numerical modeling. A two-tier Thru-Reflect-Line correction and a square root of Thru de-embedding are applied to extract the attenuation factor of about 3 dB/mm at 600 GHz, the relative phase velocity to light of about 0.716 and the characteristic impedance around 50 Ω. The fundamental propagating mode remains unique in this wide frequency range, enabling this technological to be integrated over existing circuit for THz applications. The loss performance of the coplanar waveguide ranges in the state-of-the-art opening the road for fully integrated THz circuits.