Controlled self-assembly of block copolymers in printed sub-20 nm cross-bar structures. Issue 17 (9th August 2021)

• Record Type: Journal Article
• Authors: Park, Tae Wan; Kang, Young Lim; Byun, Myunghwan; Hong, Suck Won; Ahn, Yong-Sik; Lee, Junghoon; Park, Woon Ik
• Is Part Of: Nanoscale advances. Volume 3:Issue 17(2021)
• Page Start: 5083
• Page End: 5089
• Publication Date: 2021-08-09
• Subjects: 620.5
• DOI: 10.1039/d1na00357g
• Languages: English
• ISSNs: 2516-0230

Abstract

Abstract : Combined nanopatterning method consisting of nanotransfer printing process and directed self-assembly of block copolymers to generate complex and unusual oxide/metal hybrid pattern geometries. Abstract : Directed self-assembly (DSA) of block copolymers (BCPs) has garnered much attention due to its excellent pattern resolution, simple process, and good compatibility with many other lithography methods for useful nanodevice applications. Here, we present a BCP-based multiple nanopatterning process to achieve three-dimensional (3D) pattern formation of metal/oxide hybrid nanostructures. We employed a self-assembled sub-20 nm SiO x line pattern as a master mold for nanotransfer printing (nTP) to generate a cross-bar array. By using the transfer-printed cross-bar structures as BCP-guiding templates, we can obtain well-ordered BCP microdomains in the distinct spaces of the nanotemplates through a confined BCP self-assembly process. We also demonstrate the morphological evolution of a cylinder-forming BCP by controlling the BCP film thickness, showing a clear morphological transition from cylinders to spheres in the designated nanospaces. Furthermore, we demonstrate how to control the number of BCP spheres within the cross-bar 3D pattern by adjusting the printing angle of the multiple nTP process to provide a suitable area for spontaneous BCP accommodation. This multiple-patterning-based approach is applicable to useful 3D nanofabrication of various devices with complex hybrid nanostructures.