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HARVARD Citation
Nam, K. et al. (2021). Fabrication of extreme ultraviolet lithography pellicle with nanometer-thick graphite film by sublimation of camphor supporting layer. Nanotechnology. p. . [Online].
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Nam, K. et al. (2021). Fabrication of extreme ultraviolet lithography pellicle with nanometer-thick graphite film by sublimation of camphor supporting layer. Nanotechnology. p. . [Online].