Broadband Microwave-Based Metrology Platform Development: Demonstration of In-Situ Failure Mode Diagnostic Capabilities for Integrated Circuit Reliability Analyses. (7th November 2014)

• Record Type: Journal Article
• Authors: You, Lin; Okoro, Chukwudi A.; Ahn, Jung-Joon; Kopanski, Joseph; Franklin, Rhonda R.; Obeng, Yaw S.
• Is Part Of: ECS journal of solid state science and technology. Volume 4:Number 1(2015)
• Page Start: N3113
• Page End: N3117
• Publication Date: 2014-11-07
• Subjects: Solid state chemistry -- Periodicals; Electronics -- Materials -- Periodicals; Electrochemistry -- Periodicals; 541.0421
• DOI: 10.1149/2.0151501jss
• Languages: English
• ISSNs: 2162-8777

Abstract

Abstract : In this paper, we discuss the use of broadband high frequency electromagnetic waves (RF) to non-destructively identify, classify and characterize performance-limiting defects in emerging nanoelectronic devices. As an illustration, the impact of thermal cycling on the RF signal characteristics (insertion loss (S21 ) and return loss (S11 )) is used to infer thermo-mechanical stress-induced defects in metal interconnects. The inferred defects are supported with physical analytical data where possible.