Discovery and Temperature Dependence of α-Fe2O3 in Oxide Film on Iron Bonded Wheel and Effect Mechanism of Temperature. Issue 1 (13th June 2021)

• Record Type: Journal Article
• Authors: Kuai, JiCai; Zhang, Huali; Ardashev, D. V.; Li, Xin; Liu, Shian
• Is Part Of: Integrated ferroelectrics. Volume 217:Issue 1(2021)
• Page Start: 116
• Page End: 128
• Publication Date: 2021-06-13
• Subjects: ELID grinding -- iron bonded wheel -- oxide film -- α-F2O3 -- grinding temperature -- polishing performance; Ferroelectric devices -- Periodicals; Integrated circuits -- Periodicals; 537.244805
• DOI: 10.1080/10584587.2021.1911303
• Languages: English
• ISSNs: 1058-4587

Abstract

Abstract: Polishing of oxide film on ELID wheel surface has an important effect on grinding surface quality. First, electrochemical reaction of oxide film was researched, and transformation mechanism of component of oxide film under grinding temperature was proposed. The phase compositions, generation and transformation mechanism of the α-F2 O3 in the oxide film was measured by XRD, XPS, FITR. The microstructure of oxide film was observed by using TEM. Researched results show, α-F2 O3 in the oxide film have been found, the content and transformation of α-F2 O3 are closely related to the grinding temperature. Iron oxide in oxide film is transformed into α-F2 O3 with temperature gradually, and nano grain α-F2 O3 with high purity, good crystal lattice, and grain size 10–80 nm is formed when grinding temperature is 600 °C. TEM analyzed shows, the grain in oxide film is spherality, and film structure is formed with multiple particles α-F2 O3 . The film structure reveals that polishing mechanism of oxide film isn't independent act of single particle, but is cooperative behavior of multiple particles α-F2 O3 .