Microwave-assisted atmospheric pressure plasma polymerization of hexamethyldisiloxane. (20th June 2016)

• Record Type: Journal Article
• Authors: Matsubayashi, Toshiki; Hidaka, Hiroki; Muguruma, Hitoshi
• Is Part Of: Japanese journal of applied physics. Volume 55:Number 7(2016:Jul.)
• Publication Date: 2016-06-20
• Subjects: Physics -- Periodicals; 621.05
• DOI: 10.7567/JJAP.55.076201
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: Microwave-assisted atmospheric pressure plasma polymerization is presented. A system with a re-entrant microwave cavity realizes simple matching, stable plasma, and free space under the orifice of plasma steam. Hexamethyldisiloxane is employed as a monomer, while argon is used as a carrier gas. The effective area of the hydrophobic coating film used corresponds to a circle of 20 mm diameter and the deposition rate considered is 5 nm/min. Matrix-assisted laser desorption/ionization time-of-flight mass spectroscopy shows that the coating film has a large molecular weight (>200 kDa), suggesting that a high-crosslinking and three-dimensional polymer matrix is formed and microwave-assisted atmospheric pressure plasma polymerization is fulfilled.