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HARVARD Citation
Kozak, A. et al. (2018). Structural, optoelectronic and mechanical properties of PECVD Si-C-N films: An effect of substrate bias. Materials science in semiconductor processing. pp. 65-72. [Online].
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Kozak, A. et al. (2018). Structural, optoelectronic and mechanical properties of PECVD Si-C-N films: An effect of substrate bias. Materials science in semiconductor processing. pp. 65-72. [Online].