High speed/low dose analytical electron microscopy with dynamic sampling. (May 2018)

• Record Type: Journal Article
• Authors: Hujsak, Karl A.; Roth, Eric W.; Kellogg, William; Li, Yue; Dravid, Vinayak P.
• Is Part Of: Micron. Volume 108(2018)
• Page Start: 31
• Page End: 40
• Publication Date: 2018-05
• Subjects: Scanning transmission electron microscopy -- Electron energy loss spectroscopy -- Energy dispersive X-Ray spectroscopy -- Machine learning -- Dynamic sampling -- Dose reduction; Microscopy -- Periodicals; Electron Probe Microanalysis -- Periodicals; Microscopy -- Periodicals; Microscopie -- Périodiques; Microscopy; Periodicals; 502.82
• DOI: 10.1016/j.micron.2018.03.001
• Languages: English
• ISSNs: 0968-4328

Abstract

Highlights: An algorithmic approach to high speed/low area dose analytical imaging is proposed. A facile implementation on conventional and arbitrary STEMs is developed. The method is evaluated on several prototypical analytical specimens. Over an order of magnitude acceleration/area dose reduction is demonstrated experimentally. Abstract: Technological advances in electron microscopy, particularly improved detectors and aberration correctors, have led to higher throughput and less invasive imaging of materials and biological structures by enhancing signal-to-noise ratios at lower electron exposures. Analytical methods, such as electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectrometry (EDS), have also benefitted and offer a rich set of local elemental and bonding information with nano-or atomic resolution. However, spatially resolved spectrum imaging with EELS and EDS continue to be difficult to scale due to limited detector collection angles or high signal background, requiring hours or even days for full maps. We present the principle and application of a Multi-Objective Autonomous Dynamic Sampling (MOADS) method which can accelerate spectrum mapping in EELS or EDS by over an order of magnitude. Initial guesses about the true spectrum images are constructed as measurements are collected, which allows the prediction of points which contribute information/contrast. In this fashion, an intelligently selected and reduced set of points which best approximate the true spectrum image are autonomously collected on-the-fly to save considerable time and/or radiative area dose. We implemented MOADS as a software add-on to arbitrary commercial Scanning Transmission Electron Microscopes (STEMs) equipped with a Gatan Digital Micrograph (DM, Gatan ©) interface. We demonstrate the efficacy of our proposed method on several prototypical analytical specimens, as well as dose sensitive materials. It is expected that MOADS and similar supervised dynamic sampling approaches may open the exploration of large area analytical maps or the imaging of beam reactive materials not previously thought feasible.