Analysis and test of a wireless impedance‐loaded SAW sensor. (1st May 2019)

• Record Type: Journal Article
• Authors: Zhu, Xifeng; Xing, Jianchun; Xie, Liqiang; Wang, Tianxian
• Is Part Of: Micro & nano letters. Volume 14:Number 5(2019)
• Page Start: 534
• Page End: 537
• Publication Date: 2019-05-01
• Subjects: surface acoustic wave sensors -- wireless sensor networks -- electric impedance measurement -- diffraction gratings; surface acoustic wave sensor -- wireless passive measurement -- external impedance sensing element -- reflective grating -- resistance sensor -- capacitive sensor -- wireless transceiver system -- wireless impedance‐loaded SAW sensor device -- COM modelling -- coupling‐of‐mode modelling -- lift‐off process -- network analyser; Nanotechnology -- Periodicals; Nanostructures -- Periodicals; Microtechnology -- Periodicals; 620.5
• DOI: 10.1049/mnl.2018.5375
• Languages: English
• ISSNs: 1750-0443

Abstract

Abstract : Instead of a conventional wireless transceiver system that requires batteries and complex circuits, the surface acoustic wave (SAW) sensor enables wireless passive measurement. A sensor consisting of an SAW device and external impedance sensing element is analysed. Since the reflection coefficient of the reflective grating on the SAW device depends on the load impedance, the echo characteristics are influenced by the change in the impedance of external sensing element. A resistance sensor or a capacitive sensor is selected as the external sensing element. The two different types of sensors are simulated using coupling‐of‐mode (COM) modelling, and the relationships between amplitude and phase with load impedance are analysed. On the basis of COM theory, a wireless impedance‐loaded SAW sensor is fabricated by the lift‐off process and tested by a network analyser to verify the simulation results. It is observed that the test results agree well with the simulation results. The phase change is more sensitive than the amplitude based on the results obtained. The sensitivity is 0.274°/Ω for the sensor with resistance and the sensitivity of the sensor with capacitance is 1.096°/pF. These results can guide the design of the high sensitivity impedance‐loaded SAW sensors in the future.