P‐41: Reduction and Mechanism of MOD‐Contact ESD Failure in a‐Si Product Containing PLN. Issue 1 (28th June 2021)
- Record Type:
- Journal Article
- Title:
- P‐41: Reduction and Mechanism of MOD‐Contact ESD Failure in a‐Si Product Containing PLN. Issue 1 (28th June 2021)
- Main Title:
- P‐41: Reduction and Mechanism of MOD‐Contact ESD Failure in a‐Si Product Containing PLN
- Authors:
- Zhang, Xia
Liang, Yuheng
Li, Lanyan
Liu, Gang
Hsieh, Chung-Ching
Xiao, Juncheng
Zhao, Bin - Abstract:
- Abstract : In this paper, it is found that the residual of Multi Layer is the citical factors Lead to the failure of MOD contact ESD test, The cause of residual during Laser cut has been anaysised, and the mechanism has been studied, furthermore, several improvement methods has been proposed.
- Is Part Of:
- Digest of technical papers. Volume 52:Issue 1(2021)
- Journal:
- Digest of technical papers
- Issue:
- Volume 52:Issue 1(2021)
- Issue Display:
- Volume 52, Issue 1 (2021)
- Year:
- 2021
- Volume:
- 52
- Issue:
- 1
- Issue Sort Value:
- 2021-0052-0001-0000
- Page Start:
- 1214
- Page End:
- 1216
- Publication Date:
- 2021-06-28
- Subjects:
- MOD contact ESD -- Mutilayer -- Planarization Layer (PLN)
Information display systems -- Congresses
621.3815422 - Journal URLs:
- http://catalog.hathitrust.org/api/volumes/oclc/1799368.html ↗
http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)2168-0159 ↗
http://ojps.aip.org/dbt/dbt.jsp?KEY=SIDSYM ↗
http://sid.aip.org/digest ↗
http://onlinelibrary.wiley.com/ ↗ - DOI:
- 10.1002/sdtp.14916 ↗
- Languages:
- English
- ISSNs:
- 0097-966X
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 8271.680000
British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 17473.xml