Si wire array waveguide grating with stray light reduction scheme fabricated by ArF excimer immersion lithography. Issue 22 (1st October 2013) - Okayama, H.
Abstract : A Si wire arrayed waveguide grating designed to reduce the noise and transmission peak width and avoid systematic phase error generated at the curved waveguides is reported. A slab waveguide structure to remove stray light is used. 200 GHz spacing 16 channel devices were fabricated by ArF immersion. An improved crosstalk of −23 dB was obtained.