Yield estimation model for lithography hotspot distortions. Issue 17 (1st August 2013)
- Record Type:
- Journal Article
- Title:
- Yield estimation model for lithography hotspot distortions. Issue 17 (1st August 2013)
- Main Title:
- Yield estimation model for lithography hotspot distortions
- Authors:
- Gómez, S.
Moll, F. - Abstract:
- Abstract : A yield formulation model to estimate the amount of lithography distortion expected in a printed layout is proposed. The yield formulation relates the probability of non‐failure of a lithography hotspot with the yield loss. The application of the yield model is demonstrated for three different layout configurations showing that unidimensional designs may improve manufacturing yield.
- Is Part Of:
- Electronics letters. Volume 49:Issue 17(2013)
- Journal:
- Electronics letters
- Issue:
- Volume 49:Issue 17(2013)
- Issue Display:
- Volume 49, Issue 17 (2013)
- Year:
- 2013
- Volume:
- 49
- Issue:
- 17
- Issue Sort Value:
- 2013-0049-0017-0000
- Page Start:
- 1066
- Page End:
- 1068
- Publication Date:
- 2013-08-01
- Subjects:
- distortion -- failure analysis -- lithography -- losses -- probability
yield estimation model -- lithography hotspot distortion -- printed layout -- yield loss -- unidimensional design -- manufacturing yield improvement -- probability -- nonfailure analysis
Electronics -- Periodicals
621.381 - Journal URLs:
- http://digital-library.theiet.org/content/journals/el ↗
http://estar.bl.uk/cgi-bin/sciserv.pl?collection=journals&journal=00135194 ↗
https://ietresearch.onlinelibrary.wiley.com/loi/1350911x ↗
http://www.theiet.org/ ↗ - DOI:
- 10.1049/el.2013.0469 ↗
- Languages:
- English
- ISSNs:
- 0013-5194
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 3705.060000
British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store - Ingest File:
- 17387.xml