Efficient Temperature Profile Estimation for Silicon Wafers based on Subspace Observers. Issue 2 (2020)

• Record Type: Journal Article
• Authors: Tranninger, Markus; Seeber, Richard; Steinberger, Martin; Horn, Martin
• Is Part Of: IFAC-PapersOnLine. Volume 53:Issue 2(2020)
• Page Start: 5952
• Page End: 5957
• Publication Date: 2020
• Subjects: Subspace Observer Design -- Lyapunov Exponents -- Nonlinear Systems -- Extended Kalman-Bucy Filter -- Linear Time Varying Systems -- Reduced Riccati Equation -- Wafer Temperature Estimation -- Rapid Thermal Processing; Automatic control -- Periodicals; 629.805
• DOI: 10.1016/j.ifacol.2020.12.1648
• Languages: English
• ISSNs: 2405-8963

Abstract

Abstract: This work proposes a computationally efficient observation algorithm for the surface temperature profile of heated silicon wafers. The observer exploits the fact that only a few modes of the original large-order model are unstable or slowly converging. In this case, it suffices to modify only these modes by the observer's output feedback gain. Compared to classical observation techniques, the proposed method allows to compute the feedback gain for a state space of lower dimension, which reduces computational complexity. A comparison of the approach with the extended Kalman-Bucy filter using experimental data shows its appealing performance.