Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures. (11th February 2014)

• Record Type: Journal Article
• Authors: Wang, Qinghua; Kishimoto, Satoshi; Tsuda, Hiroshi
• Other Names: Fu Y. Academic Editor.; Pedrini G. Academic Editor.
• Is Part Of: TheScientificWorldjournal. Volume 2014(2014)
• Publication Date: 2014-02-11
• Subjects: Science -- Periodicals; Technology -- Periodicals; Medicine -- Periodicals; 505
• DOI: 10.1155/2014/281954
• Languages: English
• ISSNs: 2356-6140

Abstract

Abstract : Three-way scanning electron microscope (SEM) moiré was first generated using a designed three-way electron beam (EB) in an SEM. The spot-type three-way SEM moiré comes from the interference between the three-way EB and the specimen grating in which the periodic cells are arranged in a triangular manner. The deformation and the structure information of the specimen grating in three directions can be simultaneously obtained from the three-way SEM moiré. The design considerations of the three-way EB were discussed. As an illustration, the three-way SEM moiré spots produced on a silicon slide were presented. The proposed three-way SEM moiré method is expected to characterize micro/nanostructures in triangular or hexagonal arrangements in three directions at the same time.