Narrowband, Visible-Blind UV-A Sensor Based on a Mg0.52Zn0.48O Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target. (26th March 2014)

• Record Type: Journal Article
• Authors: Kohama, Yuki; Nagai, Takuya; Inada, Mitsuru; Saitoh, Tadashi
• Other Names: Barber Zoe Academic Editor.
• Is Part Of: Advances in materials science and engineering. Volume 2014(2014)
• Publication Date: 2014-03-26
• Subjects: Materials science -- Periodicals; Materials science; Periodicals; 620.11
• DOI: 10.1155/2014/120463
• Languages: English
• ISSNs: 1687-8434

Abstract

Abstract : A narrowband, visible-blind ultraviolet photodetector (PD) for UV-A is fabricated using a Mg0.52 Zn0.48 O film that is formed on a quartz substrate by a radio-frequency sputtering technique using a ZnO-Mg composite target. The content of Mg in the film is controlled by varying the number of Mg chips on the ZnO plate. The fabricated PD has a metal-semiconductor-metal structure with interdigitated electrodes and exhibits a narrow 3 dB bandwidth of 26 nm with a peak response wavelength of 340 nm and a cut-off wavelength of 353 nm. Moreover, the peak responsivity of the PD increases linearly with the bias voltage up to 30 V, indicating that the device operates via a photoconductive gain mechanism.