Effects of different divalent cations in mTi-based codopants (m = Mg or Zn) on the piezoelectric properties of AlN thin films. Issue 3 (15th February 2020)

• Record Type: Journal Article
• Authors: Anggraini, Sri Ayu; Uehara, Masato; Hirata, Kenji; Yamada, Hiroshi; Akiyama, Morito
• Is Part Of: Ceramics international. Volume 46:Issue 3(2020)
• Page Start: 4015
• Page End: 4019
• Publication Date: 2020-02-15
• Subjects: Piezoelectricity -- Sputtering -- Aluminum nitride -- MgTi codopants -- ZnTi codopants -- Thin films; Ceramics -- Periodicals; Céramique industrielle -- Périodiques; Ceramics; Periodicals; Electronic journals; 666
• DOI: 10.1016/j.ceramint.2019.10.041
• Languages: English
• ISSNs: 0272-8842

Abstract

Abstract: The understanding of the effects of different divalent cations in codopants for AlN is important for the design of high-performance AlN-based piezoelectric thin films. The addition of Mg-based codopants (e.g., MgTi) into AlN has been one of the most effective methods for the promotion of a higher piezoelectric response ( d 33 ). In this study, Mg was replaced by Zn as the divalent cation in a single dopant or codopant and the effects on the piezoelectric responses were investigated. The substitution of Mg with Zn in a single dopant or codopant affected the crystallinity, composition, and eventually d 33 of the thin film.