Application of Ozone Related Processes to Mineralize Tetramethyl Ammonium Hydroxide in Aqueous Solution. (25th November 2013)

• Record Type: Journal Article
• Authors: Chiou, Chyow-San; Chuang, Kai-Jen; Lin, Ya-Fen; Chen, Hua-Wei; Ma, Chih-Ming
• Other Names: Muruganandham Manickavachagam Academic Editor.
• Is Part Of: International journal of photoenergy. Volume 2013(2013)
• Publication Date: 2013-11-25
• Subjects: Photochemistry -- Periodicals; Photobiology -- Periodicals; Chemistry, Physical and theoretical -- Periodicals; Photochimie; Photobiologie; Chimie physique et théorique; Chemistry, Physical and theoretical; Photobiology; Photochemistry; Electronic journals; Periodicals; 541.35
• DOI: 10.1155/2013/191742
• Languages: English
• ISSNs: 1110-662X

Abstract

Abstract : Tetramethyl ammonium hydroxide (TMAH) is an anisotropic etchant used in the wet etching process of the semiconductor industry and is hard to degrade by biotreatments when it exists in wastewater. This study evaluated the performance of a system combined with ultraviolet, magnetic catalyst (SiO 2 /Fe 3 O 4 ) and O 3, denoted as UV/O 3, to TMAH in an aqueous solution. The mineralization efficiency of TMAH under various conditions follows the sequence: UV/O 3 > UV/H 2 O 2 /O 3 > H 2 O 2 /SiO 2 /Fe 3 O 4 /O 3 > H 2 O 2 /O 3 > SiO 2 /Fe 3 O 4 /O 3 > O 3 > UV/H 2 O 2 . The results suggest that UV/O 3 process provides the best condition for the mineralization of TMAH (40 mg/L), resulting in 87.6% mineralization, at 60 min reaction time. Furthermore, the mineralization efficiency of SiO 2 /Fe 3 O 4 /H 2 O 2 /O 3 was significantly higher than that of O 3, H 2 O 2 /O 3, and UV/H 2 O 2 . More than 90% of the magnetic catalyst was recovered and easily redispersed in a solution for reuse.