Cite
HARVARD Citation
Kim, H. (2021). Effect of electrode heating on the distribution of the ion production rate in a capacitively coupled plasma deposition reactor in consideration of thermal decomposition. Vacuum. p. . [Online].
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Kim, H. (2021). Effect of electrode heating on the distribution of the ion production rate in a capacitively coupled plasma deposition reactor in consideration of thermal decomposition. Vacuum. p. . [Online].